- 专利标题: Seed layer repair bath
-
申请号: US09982398申请日: 2001-10-17
-
公开(公告)号: US06660153B2公开(公告)日: 2003-12-09
- 发明人: David Merricks , Denis Morrissey , Martin W. Bayes , Mark Lefebvre , James G. Shelnut , Donald E. Storjohann
- 申请人: David Merricks , Denis Morrissey , Martin W. Bayes , Mark Lefebvre , James G. Shelnut , Donald E. Storjohann
- 主分类号: C25D502
- IPC分类号: C25D502
摘要:
Disclosed are methods for repairing seed layers prior to subsequent metallization during the manufacture of electronic devices.
公开/授权文献
- US20020088713A1 Seed layer repair bath 公开/授权日:2002-07-11
信息查询