A method for forming a cavity structure provided with a thin bottom plate is comprises the following steps. The first step is to deform plastically a part of a metal plate so as to form a cavity on one surface of a metal plate wherein the cavity has an oddly bottom surface provided with subsections being different from each other in depth. Simultaneously a protrusion is formed on the other surface of the metal plate by shifting an amount of metal corresponding to the cavity into the protrusion wherein the protrusion has substantially similar figure to the cavity. Then a coupling section, which keeps the protrusion integral with the metal plate, is formed so as to make the protrusion smaller than the cavity. And the protrusion is removed from the metal plate so as to make the other surface of the metal plate flat and to form the bottom plate of the cavity thin while remaining the coupling section.