发明授权
US06666337B1 Method and apparatus for determining wafer identity and orientation
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用于确定晶片同一性和取向的方法和装置
- 专利标题: Method and apparatus for determining wafer identity and orientation
- 专利标题(中): 用于确定晶片同一性和取向的方法和装置
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申请号: US09782843申请日: 2001-02-14
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公开(公告)号: US06666337B1公开(公告)日: 2003-12-23
- 发明人: Michael R. Conboy , Sam H. Allen, Jr. , Elfido Coss, Jr.
- 申请人: Michael R. Conboy , Sam H. Allen, Jr. , Elfido Coss, Jr.
- 主分类号: B07C500
- IPC分类号: B07C500
摘要:
A system for identifying wafers contained in a wafer carrier includes a wafer sorter. Each wafer includes a surface terminating in an edge and a plurality of sector identification codes disposed on the surface proximate the edge. The wafer sorter is adapted to scan at least a portion of a wafer extending from the carrier and to identify at least one of the sector identification codes on the wafer independent of the orientation of the wafer in the wafer carrier. A method for identifying wafers contained in a wafer carrier is provided. Each wafer includes a surface terminating in an edge and a plurality of sector identification codes disposed on the surface proximate the edge. The method includes scanning at least a portion of a wafer extending from the carrier and identifying at least one of the sector identification codes on the wafer independent of the orientation of the wafer in the wafer carrier.
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