发明授权
- 专利标题: Substrate coated with an MgO layer
- 专利标题(中): 基材涂有MgO层
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申请号: US09687845申请日: 2000-10-13
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公开(公告)号: US06676814B1公开(公告)日: 2004-01-13
- 发明人: Johannes Stollenwerk , Christoph Daube , Achim Gürke
- 申请人: Johannes Stollenwerk , Christoph Daube , Achim Gürke
- 优先权: EP97120354 19971120; EP98121350 19981110
- 主分类号: C23C1434
- IPC分类号: C23C1434
摘要:
A method for manufacturing a display panel substrate has the steps of flowing a working gas along and out of a slit defined between two sputtering targets of Mg and toward the substrate thereby selecting the purity of the Mg material of the targets to be at least 99% and thereby blowing sputtered-off material out of the slit and toward the substrate. Introduction, in an area between the slit and the substrate, of a reactive gas containing oxygen, follows, and reacting the sputtered-off material with the reactive gas results in depositing on the substrate, an MgO layer. The method also includes setting the temperature of the substrate during the coating process.
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