发明授权
US06677200B2 Method of forming non-volatile memory having floating trap type device
失效
形成具有浮动陷阱型装置的非易失性存储器的方法
- 专利标题: Method of forming non-volatile memory having floating trap type device
- 专利标题(中): 形成具有浮动陷阱型装置的非易失性存储器的方法
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申请号: US10194182申请日: 2002-07-12
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公开(公告)号: US06677200B2公开(公告)日: 2004-01-13
- 发明人: Chang-Hyun Lee , Jung-Dal Choi , Sung-Hoi Hur
- 申请人: Chang-Hyun Lee , Jung-Dal Choi , Sung-Hoi Hur
- 优先权: KR2001-47945 20010809
- 主分类号: H01L213366
- IPC分类号: H01L213366
摘要:
A method of forming a non-volatile memory having a floating trap-type device is disclosed in the present invention. In the method, a relatively thick thermal oxide layer is formed at a semiconductor substrate and patterned to leave a thick thermal oxide pattern at a high-voltage region (a high-voltage region defining step). An oxide-nitride-oxide (ONO) layer is formed over substantially the entire surface (the substantial surface) of the semiconductor substrate and patterned to leave an ONO pattern at a cell memory region (a cell memory region defining step). After the high-voltage region defining step and the cell memory region defining step, a thermal oxidizing process is performed with respect to the semiconductor substrate where a low-voltage region is exposed, thereby forming a relatively thin gate insulation layer for a low-voltage type device (a low-voltage region defining region).
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