Invention Grant
US06677695B2 MEMS electrostatic actuators with reduced actuation voltage 有权
具有降低致动电压的MEMS静电致动器

MEMS electrostatic actuators with reduced actuation voltage
Abstract:
A movable microelectromechanical mirror structure for a microelectromechanical structure (MEMS) has an actuator (electrodes) for the moving mirror. The electrodes are situated at a predetermined angle to the horizontal thus improving the relationship between force applied on the mirror and the gap between the mirror and the electrodes. The angular electrode placement is achieved by the provision of a deformable electrode support member mounted on the substrate, with at least one of the electrodes mounted on the electrode support member, and a deforming element mounted against the deformable electrode support member such as to permanently maintain the deformable electrode support member in a deformed state.
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