Invention Grant
- Patent Title: MEMS electrostatic actuators with reduced actuation voltage
- Patent Title (中): 具有降低致动电压的MEMS静电致动器
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Application No.: US10244630Application Date: 2002-09-17
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Publication No.: US06677695B2Publication Date: 2004-01-13
- Inventor: Vijayakumar Rudrappa Dhuler , Edward Arthur Hill
- Applicant: Vijayakumar Rudrappa Dhuler , Edward Arthur Hill
- Main IPC: H02N100
- IPC: H02N100

Abstract:
A movable microelectromechanical mirror structure for a microelectromechanical structure (MEMS) has an actuator (electrodes) for the moving mirror. The electrodes are situated at a predetermined angle to the horizontal thus improving the relationship between force applied on the mirror and the gap between the mirror and the electrodes. The angular electrode placement is achieved by the provision of a deformable electrode support member mounted on the substrate, with at least one of the electrodes mounted on the electrode support member, and a deforming element mounted against the deformable electrode support member such as to permanently maintain the deformable electrode support member in a deformed state.
Public/Granted literature
- US20030052569A1 Electrostatic actuators in micro-electromechanical systems Public/Granted day:2003-03-20
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