发明授权
- 专利标题: Semiconductor device and method of manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US09988138申请日: 2001-11-19
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公开(公告)号: US06680499B2公开(公告)日: 2004-01-20
- 发明人: Yoshinori Kumura , Hiroyuki Kanaya , Iwao Kunishima
- 申请人: Yoshinori Kumura , Hiroyuki Kanaya , Iwao Kunishima
- 优先权: JP2000-352265 20001120; JP2001-341392 20011107
- 主分类号: H01L2976
- IPC分类号: H01L2976
摘要:
Provided are a semiconductor memory device that permits increasing the degree of integration without decreasing the capacitance of the capacitor included in a memory cell, and a method of manufacturing the particular semiconductor memory device. Specifically, provided are a semiconductor memory device, comprising a semiconductor substrate, an interlayer insulating film formed on the semiconductor substrate, a first electrode formed on the interlayer insulating film, a first ferroelectric film formed on the first electrode, a second electrode formed on the first ferroelectric film, a second ferroelectric film formed on the second electrode, and a third electrode formed on the second ferroelectric film, and a method of manufacturing the particular semiconductor memory device.
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