发明授权
US06682975B2 Semiconductor memory device having self-aligned contact and fabricating method thereof
有权
具有自对准接触的半导体存储器件及其制造方法
- 专利标题: Semiconductor memory device having self-aligned contact and fabricating method thereof
- 专利标题(中): 具有自对准接触的半导体存储器件及其制造方法
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申请号: US10001535申请日: 2001-11-13
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公开(公告)号: US06682975B2公开(公告)日: 2004-01-27
- 发明人: Myeong-cheol Kim , Byeong-yun Nam , Sang-sup Jeong , Tae-hyuk Ahn
- 申请人: Myeong-cheol Kim , Byeong-yun Nam , Sang-sup Jeong , Tae-hyuk Ahn
- 优先权: KR1999-37106 19990902; KR2000-33842 20000620
- 主分类号: H01L218242
- IPC分类号: H01L218242
摘要:
There is provided a method of fabricating a semiconductor memory device having a self-aligned contact, including the steps of forming a plurality of gate electrodes by interposing a gate insulating layer on an active region of a semiconductor substrate in a predetermined direction at constant intervals, forming a first insulating layer on the resultant structure having the gate electrodes and then forming one or more of each of first and second openings which partially open an active region of the semiconductor substrate, forming first and second pad layers by filling the first and second openings with a conductive material, forming a first interlayer dielectric film on the first insulating layer having the first and second pad layers and forming a third opening which opens the surface of the first pad layer, forming a plurality of bit lines in a direction orthogonal to the gate electrodes on the first interlayer dielectric film while filling the third opening, depositing an insulating layer on the resultant structure having the bit lines and removing the insulating layer on the bit lines and on the first interlayer dielectric film to form insulating spacers only at both side walls of the bit lines, forming a second interlayer dielectric film on the resultant structure having the insulating spacers and forming a fourth opening self-aligned to the insulating spacers to open the surface of the second pad layer, and filling the fourth opening with a conductive material.
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