发明授权
- 专利标题: Fabrication of electronic circuit elements using unpatterned semiconductor layers
- 专利标题(中): 使用未图案化的半导体层制造电子电路元件
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申请号: US09904109申请日: 2001-07-12
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公开(公告)号: US06683333B2公开(公告)日: 2004-01-27
- 发明人: Peter T. Kazlas , Michael G. Hack , Paul S. Drzaic , Guy M. Danner , Karl R. Amundson
- 申请人: Peter T. Kazlas , Michael G. Hack , Paul S. Drzaic , Guy M. Danner , Karl R. Amundson
- 主分类号: H01L31072
- IPC分类号: H01L31072
摘要:
A thin-film transistor array comprises at least first and second transistors. Each of the first and second transistors include a shared silicon layer, i.e., an active layer. The shared semiconductor layer extends continuously between the first and second transistors, and includes a concentration of dopant that increases a resistivity of the semiconductor layer and reduces a leakage current through the semiconductor layer while permitting functioning of the transistor array.
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