发明授权
US06686594B2 On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
有权
在线紫外可见光卤素气体分析仪,用于半导体处理污水监测
- 专利标题: On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
- 专利标题(中): 在线紫外可见光卤素气体分析仪,用于半导体处理污水监测
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申请号: US10003223申请日: 2001-10-29
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公开(公告)号: US06686594B2公开(公告)日: 2004-02-03
- 发明人: Bing Ji , Robert Gordon Ridgeway , Eugene Joseph Karwacki, Jr. , Howard Paul Withers, Jr. , Steven Arthur Rogers , Peter James Maroulis , John Giles Langan
- 申请人: Bing Ji , Robert Gordon Ridgeway , Eugene Joseph Karwacki, Jr. , Howard Paul Withers, Jr. , Steven Arthur Rogers , Peter James Maroulis , John Giles Langan
- 主分类号: G01J312
- IPC分类号: G01J312
摘要:
An on-line halogen analyzer system and method of use for semiconductor processing effluent monitoring. The system includes sampling the effluent stream into an absorption cell, and passing UV-Visible light through the effluent sample in the cell. After passing through the sample the light is collected by a photo detector for real-time wavelength-selective absorption analysis. The system provides simultaneous determination of the concentrations of multiple halogen gases (e.g. F2, Cl2, Br2, and I2) in semiconductor processing effluent streams. The invention can be used for chemical vapor deposition (CVD) chamber cleaning endpoint determination and to improve fluorine utilization efficiency in remote plasma downstream CVD chamber cleaning processes.