公开(公告)号：US06614528B1

公开(公告)日：2003-09-02

申请号：US09447171

申请日：1999-11-22

Applicant: Wolfram Bohle

Inventor： Wolfram Bohle

IPC: G01J312

CPC classification number: G01J3/36 ,  G01J3/20

Abstract: In order to extend the available spectral range and to optimize spectral resolution while retaining a compact spectrometer setup, two diffraction gratings are operated with congruent focal curves in a Paschen-Runge geometry. The spectrometer features only one entrance slit and allows an adequate adaptation of the covered spectral range to the demands of analytical spectrometry. Apart from photomultiplier tubes commercial solid-state linear array sensors placed tangential at the Rowland circle are used for simultaneous detection of the spectrum. By employing angular cut cylindrical mirrors the radiation is deflected by 90% upward or downward in an alternating series. In this way two effects are achieved, an almost complete detection of the spectrum firstly and secondly a gain of intensity by focusing of radiation perpendicular to the plane of dispersion.

Abstract translation: 为了扩展可用的光谱范围并优化光谱分辨率，同时保持紧凑的光谱仪设置，两个衍射光栅以Paschen-Runge几何中的全局焦点曲线运行。 光谱仪仅具有一个入口狭缝，并允许覆盖的光谱范围适用于分析光谱法的要求。 除了光电倍增管外，商业固态线性阵列传感器放置在Rowland圆圈上切线，用于同时检测光谱。 通过采用角切圆柱镜，辐射以交替的方式向上或向下偏转90％。 以这种方式实现了两个效果，首先对光谱进行几乎完全的检测，其次是通过垂直于色散平面的辐射的聚焦获得强度增益。

公开(公告)号：US06549281B2

公开(公告)日：2003-04-15

申请号：US09870954

申请日：2001-05-30

Applicant: Isao Tokumoto

Inventor： Isao Tokumoto

IPC: G01J312

CPC classification number: G01J3/18

Abstract: In the monochromator, when measured beam which is diffracted by a plane diffraction grating is collected by a collimator to be returned, the measured beam is displaced by a displacement member in a direction parallel to rulings of the plane diffraction grating and is passed through a first cut-off slit having a slit of a predetermined width formed in a direction perpendicular to the direction of the rulings.

公开(公告)号：US06473176B2

公开(公告)日：2002-10-29

申请号：US09820434

申请日：2001-03-29

Applicant: David A. Basiji ,  William E. Ortyn

Inventor： David A. Basiji ,  William E. Ortyn

IPC: G01J312

CPC classification number: G01N21/6456 ,  G01J3/2803 ,  G01J3/2823 ,  G01N15/147 ,  G01N21/05 ,  G01N21/6428 ,  G01N2015/0294 ,  G01N2015/1006 ,  G01N2015/1472 ,  G01N2015/1486 ,  G01N2021/052 ,  G01N2021/058 ,  G02B7/28 ,  G02B27/1013 ,  G02B27/126 ,  G02B27/144 ,  G02B27/145 ,  G02B27/148

Abstract: Light from an object such as a cell moving through an imaging system is collected and dispersed so that it can be imaged onto a detector. The light can be emitted from a luminous object or can be light from a light source that has been scattered or not absorbed by the object or can include a light emission by one or more probes within or on the object. Multiple objects passing through the imaging system can be imaged, producing both scatter images and dispersed images at different locations on one or more detectors. In one embodiment, the detector is divided into a plurality of zones so that each of a plurality of different images are spectrally dispersed onto a different zone of the detector.

Abstract translation: 来自诸如移动通过成像系统的细胞的物体的光被收集和分散，使得其可以成像到检测器上。 光可以从发光物体发射，或者可以是来自被物体散射或不被吸收的光源的光，或者可以包括物体内或物体上的一个或多个探针的发光。 通过成像系统的多个物体可被成像，在一个或多个检测器上的不同位置产生分散图像和分散图像。 在一个实施例中，检测器被分成多个区域，使得多个不同图像中的每一个被频谱分散到检测器的不同区域上。

公开(公告)号：US06587199B1

公开(公告)日：2003-07-01

申请号：US09513551

申请日：2000-02-25

Applicant: Ui Luu

Inventor： Ui Luu

IPC: G01J312

CPC classification number: G01J3/06

Abstract: An embedded data acquisition and control system for a precision instruments, such as a non-invasive glucose prediction instrument is disclosed. One feature of the invention provides synchronization of stepper motor position and analog-to-digital converters. An embedded controller is provided that controls the stepper motor driver directly to minimize the wavelength shift error due to the asynchronous condition. The controller synchronizes the event of reading the A/D converters with each stepper motor position. Because the stepper motor controls the wavelength of the monochromator optical output, the net result is that each A/D conversion recorded by the embedded controller is precisely tracked to a specific wavelength. Another feature of the invention provides closed loop motor position control for enhanced system performance. In the closed loop system, a position encoder is coupled to the stepper motor shaft. The encoded position signal is processed by a digital encoder at the bipolar stepper motor drive, resulting in an actual position feedback to the embedded controller. Because the embedded controller has the position feedback, it can initiate the next step command as soon as the position feedback reaches its target. The step rate is increased by reducing the time delay that was set by a conservative value as indicated in the open loop control mode. One advantage of this method is to achieve highest speed in all load conditions without missing steps. A further feature of the invention provides optical Isolation to minimize motor noise. Thus, optical isolation is provided at a bipolar stepper motor drive and embedded controller interface. To maximize system sensitivity, optical isolation is implemented between the embedded controller and the stepper motor drive.

Abstract translation: 公开了一种用于诸如非侵入式葡萄糖预测仪器的精密仪器的嵌入式数据采集和控制系统。 本发明的一个特征提供了步进电机位置和模数转换器的同步。 提供了一种嵌入式控制器，可以直接控制步进电机驱动器，以最小化由异步状态引起的波长偏移误差。 控制器同步读取A / D转换器与每个步进电机位置的事件。 由于步进电机控制单色器光输出的波长，所以最终的结果是嵌入式控制器记录的每个A / D转换被精确跟踪到特定的波长。 本发明的另一个特征提供闭环电动机位置控制，以提高系统性能。 在闭环系统中，位置编码器连接到步进电机轴上。 编码位置信号由双极步进电机驱动器上的数字编码器处理，导致对嵌入式控制器的实际位置反馈。 由于嵌入式控制器具有位置反馈功能，因此一旦位置反馈到达目标位置即可启动下一步命令。 通过减少由开环控制模式中指示的保守值设置的时间延迟来增加步进速率。 该方法的一个优点是在所有负载条件下实现最高速度，而不会丢失步骤。 本发明的另一个特征是提供光隔离以最小化电机噪声。 因此，在双极步进电机驱动器和嵌入式控制器接口处提供光隔离。 为了最大化系统灵敏度，在嵌入式控制器和步进电机驱动器之间实现光隔离。

公开(公告)号：US06211955B1

公开(公告)日：2001-04-03

申请号：US09538604

申请日：2000-03-29

Applicant: David A. Basiji ,  William E. Ortyn

Inventor： David A. Basiji ,  William E. Ortyn

IPC: G01J312

CPC classification number: G06K9/00127 ,  G01J3/2803 ,  G01J3/2823 ,  G01N15/147 ,  G01N21/6428 ,  G01N21/6456 ,  G01N21/85 ,  G01N2015/0294 ,  G01N2015/0693 ,  G01N2015/1006 ,  G01N2015/1472 ,  G01N2015/1486 ,  G02B7/28 ,  G02B27/145 ,  G02B27/148

Abstract: Light from an object such as a cell moving through an imaging system is collected and dispersed so that it can be imaged onto a time delay and integration (TDI) detector. The light can be emitted from a luminous object or can be light from a light source that has been scattered or not absorbed by the object or can include a light emission by one or more probes within or on the object. Multiple objects passing through the imaging system can be imaged, producing both scatter images and dispersed images at different locations on one or more TDI detectors.

Abstract translation: 来自诸如移动通过成像系统的单元的物体的光被收集和分散，使得其可被成像到时间延迟和积分（TDI）检测器上。 光可以从发光物体发射，或者可以是来自被物体散射或不被吸收的光源的光，或者可以包括物体内或物体上的一个或多个探针的发光。 可以对穿过成像系统的多个物体进行成像，在一个或多个TDI检测器上的不同位置产生散射图像和分散图像。

公开(公告)号：US06690468B1

公开(公告)日：2004-02-10

申请号：US09614339

申请日：2000-07-12

Applicant: Karl Benzel ,  Thomas Fuhrmann ,  Andreas Conzelmann ,  Eberhard Loecklin

Inventor： Karl Benzel ,  Thomas Fuhrmann ,  Andreas Conzelmann ,  Eberhard Loecklin

IPC: G01J312

CPC classification number: G01J3/12 ,  G01J3/0224 ,  G01J3/0294

Abstract: An optical spectrum analyzer of novel design, in which several different spectra can be measured and analyzed simultaneously. A measuring signal is used as a reference signal for calibrating the optical spectrum analyzer. The light rays are admitted via a coupling device with several coupling apertures arranged in a line; and via a separate decoupling device comprising respective decoupling apertures arranged in a line, the light rays are decoupled. Height offset is realized by a 90° deviation prism. The arrangement makes possible simultaneous analysis of several optical lines with little retroreflection as well as uninterrupted calibration of the measuring process.

Abstract translation: 一种新颖设计的光谱分析仪，其中可以同时测量和分析几种不同的光谱。 测量信号用作校准光谱分析仪的参考信号。 光线通过耦合装置进入，多个耦合孔布置成一条线; 并且经由单独的去耦装置，其包括排列成一行的各自的去耦孔，光线被解耦。 高度偏移由90°偏差棱镜实现。 该布置使得可以同时分析几个具有很小逆向反射的光线以及测量过程的不间断校准。

公开(公告)号：US06686594B2

公开(公告)日：2004-02-03

申请号：US10003223

申请日：2001-10-29

Applicant: Bing Ji ,  Robert Gordon Ridgeway ,  Eugene Joseph Karwacki, Jr. ,  Howard Paul Withers, Jr. ,  Steven Arthur Rogers ,  Peter James Maroulis ,  John Giles Langan

Inventor： Bing Ji ,  Robert Gordon Ridgeway ,  Eugene Joseph Karwacki, Jr. ,  Howard Paul Withers, Jr. ,  Steven Arthur Rogers ,  Peter James Maroulis ,  John Giles Langan

IPC: G01J312

CPC classification number: G01N21/31 ,  G01N21/33

Abstract: An on-line halogen analyzer system and method of use for semiconductor processing effluent monitoring. The system includes sampling the effluent stream into an absorption cell, and passing UV-Visible light through the effluent sample in the cell. After passing through the sample the light is collected by a photo detector for real-time wavelength-selective absorption analysis. The system provides simultaneous determination of the concentrations of multiple halogen gases (e.g. F2, Cl2, Br2, and I2) in semiconductor processing effluent streams. The invention can be used for chemical vapor deposition (CVD) chamber cleaning endpoint determination and to improve fluorine utilization efficiency in remote plasma downstream CVD chamber cleaning processes.

Abstract translation: 一种在线卤素分析仪系统及其半导体处理流出物监测方法。 该系统包括将流出物流取样成吸收池，并将紫外可见光通过电池中的流出物样品。 通过样品后，光被光电检测器收集，用于实时波长选择吸收分析。 该系统同时测定半导体处理流出物流中多种卤素气体（如F2，Cl2，Br2和I2）的浓度。 本发明可用于化学气相沉积（CVD）室清洁终点确定，并提高远程等离子体下游CVD室清洁过程中的氟利用效率。

公开(公告)号：US06657724B1

公开(公告)日：2003-12-02

申请号：US09530265

申请日：2000-05-16

Applicant: David J Dunstan ,  Mark D Frogley

Inventor： David J Dunstan ,  Mark D Frogley

IPC: G01J312

CPC classification number: G01J3/44 ,  G01J3/18

Abstract: An optical filter is provided in the form of a subtractive double monochromator. In each dispersive stage, a concave mirror focuses light between a diffraction grating and a transfer mirror between the stages. Light which misses the transfer mirror is rejected. To reduce aberrations over a wide bandwidth, the radius of curvature R of the mirror is centered on the grating and the transfer mirror has a radius of curvature R/2 and is located midway between the mirror and the grating. The mirror 34 thus coincides with the locus of the focus of the spectral image in both stages.

Abstract translation: 滤光器以减色双色单元的形式提供。 在每个色散阶段，凹面镜将光线聚焦在衍射光栅和阶段之间的转印镜之间。 错过传输镜的光线被拒绝。 为了减小宽带宽上的像差，镜的曲率半径R以光栅为中心，传输镜具有曲率半径R / 2，并位于反射镜与光栅之间。 因此，反射镜34在两个阶段中与光谱图像的焦点的轨迹重合。

公开(公告)号：US06433869B1

公开(公告)日：2002-08-13

申请号：US09465998

申请日：1999-12-17

Applicant: Chris Barnard ,  Kexing Liu

Inventor： Chris Barnard ,  Kexing Liu

IPC: G01J312

CPC classification number: G01J9/00

Abstract: A novel wavelength measurement method wherein an optical pulse is launched into a dispersive medium with known dispersion properties, such as a dispersion compensating fibre or a dispersion compensating Bragg grating. The specific wavelength of the dispersion-induced light beam is obtained by measuring the propagation time delay through the dispersive medium and relating that propagation time to the calibrated dispersive medium.

Abstract translation: 一种新颖的波长测量方法，其中将光脉冲发射到具有已知色散特性的色散介质中，例如色散补偿光纤或色散补偿布拉格光栅。 通过测量通过分散介质的传播时间延迟并将该传播时间与校准的色散介质相关联，获得色散诱导光束的特定波长。