发明授权
- 专利标题： Liquid discharge head substrate, liquid discharge head, liquid discharge apparatus having these elements, manufacturing method of liquid discharge head, and driving method of the same
- 专利标题（中）： 排液头基板，排液头，具有这些元件的液体排出装置，排液头的制造方法及其驱动方法
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申请号： US09584485申请日： 2000-06-01
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公开(公告)号： US06688729B1公开(公告)日： 2004-02-10
- 发明人: Yoshiyuki Imanaka , Sadayuki Sugama , Ichiro Saito , Hiroyuki Ishinaga , Akihiro Yamanaka , Masahiko Kubota
- 申请人： Yoshiyuki Imanaka , Sadayuki Sugama , Ichiro Saito , Hiroyuki Ishinaga , Akihiro Yamanaka , Masahiko Kubota
- 优先权： JP11-158361 19990604; JP11-167374 19990614
- 主分类号： B41J205
- IPC分类号： B41J205
摘要：
A liquid discharge head substrate used for a liquid discharge head adapted to discharge liquid by applying discharge energy to the liquid includes a semiconductor substrate provided with an energy conversion element for converting electric energy into discharge energy. The semiconductor substrate is further provided with a function element made of a ferroelectric material.
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