Invention Grant
US06692891B2 Photoresist composition containing photo radical generator with photoacid generator
失效
含有光致酸发生剂的光自由基发生剂的光致抗蚀剂组合物
- Patent Title: Photoresist composition containing photo radical generator with photoacid generator
- Patent Title (中): 含有光致酸发生剂的光自由基发生剂的光致抗蚀剂组合物
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Application No.: US09879325Application Date: 2001-06-12
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Publication No.: US06692891B2Publication Date: 2004-02-17
- Inventor: Jae Chang Jung , Geun Su Lee , Min Ho Jung , Ki Ho Baik
- Applicant: Jae Chang Jung , Geun Su Lee , Min Ho Jung , Ki Ho Baik
- Priority: KR2000-37228 20000630
- Main IPC: G03F7038
- IPC: G03F7038

Abstract:
The present invention relates to a photoresist composition containing a photo radical generator, more specifically, to a photoresist composition which comprises (a) photoresist resin, (b) a photoacid generator, (c) an organic solvent and (d) a photo radical generator. The present photoresist composition reduces or prevents a sloping pattern formation due to a higher concentration of acid in the upper portion of the photoresist relative to the lower portion of the photoresist.
Public/Granted literature
- US20020012873A1 Photoresist composition containing photo radical generator with photoacid generator Public/Granted day:2002-01-31
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