发明授权
US06696718B1 Capacitor having an electrode formed from a transition metal or a conductive metal-oxide, and method of forming same
失效
具有由过渡金属或导电金属氧化物形成的电极的电容器及其形成方法
- 专利标题： Capacitor having an electrode formed from a transition metal or a conductive metal-oxide, and method of forming same
- 专利标题（中）： 具有由过渡金属或导电金属氧化物形成的电极的电容器及其形成方法
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申请号： US09286807申请日： 1999-04-06
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公开(公告)号： US06696718B1公开(公告)日： 2004-02-24
- 发明人: F. Daniel Gealy , Thomas M. Graettinger
- 申请人： F. Daniel Gealy , Thomas M. Graettinger
- 主分类号： H01L27108
- IPC分类号： H01L27108
摘要：
A capacitor including a first electrode selected from a group consisting of transition metals, conductive metal-oxides, alloys thereof, and combinations thereof. The capacitor also includes a second electrode and a dielectric between the first and second electrodes. The present invention may be used to form devices, such as memory devices and processors. The present invention also includes a method of making a capacitor. The method includes forming a first electrode selected from a group consisting of transition metals, conductive metal-oxides, and alloys thereof. The method also includes forming a second electrode and forming a dielectric between the first and second electrodes.
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