发明授权
- 专利标题: Method of manufacturing a piezoelectric filter with an acoustic resonator situated on an acoustic reflector layer formed by a carrier substrate
- 专利标题(中): 制造具有位于由载体基板形成的声反射层上的声谐振器的压电滤波器的方法
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申请号: US09790298申请日: 2001-02-21
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公开(公告)号: US06698073B2公开(公告)日: 2004-03-02
- 发明人: Ronald Dekker , Henricus Godefridus Rafael Maas
- 申请人: Ronald Dekker , Henricus Godefridus Rafael Maas
- 优先权: EP00200615 20000222
- 主分类号: H04R1710
- IPC分类号: H04R1710
摘要:
A method of manufacturing a piezoelectric filter with a resonator comprising a layer of a piezoelectric material (1) which is provided with an electrode (2,3) on either side, which resonator is situated on an acoustic reflector layer (4) formed on a surface (6) of a carrier substrate (7). In the method, the layer of piezoelectric material (1) is provided on a surface (8) of an auxiliary substrate (9), after which a first electrode (2) is formed on the layer of piezoelectric material (1). The acoustic reflector layer (4) is provided on and next to the first electrode (2), and the structure thus formed is secured with the side facing away from the auxiliary substrate (9) on the carrier substrate (7). The auxiliary substrate (9) is removed and a second electrode (3) situated opposite the first electrode (2) is provided.
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