发明授权
US06700127B2 Point source for producing electrons beams 失效
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Point source for producing electrons beams
摘要:
An apparatus for producing an electron beam, containing a vacuum chamber, a source of electron beams within the vacuum chamber, and a device for focusing the electrons beams. An electron transparent window is formed at the end of the vacuum chamber; and the vacuum chamber has a volume of less than about 1 cubic millimeter and a pressure of less than 10−7 Torr. In one embodiment, the focusing device is located outside of the vacuum chamber.
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