发明授权
US06701268B2 Method for calibrating scanning probe and computer-readable medium therefor
有权
用于校准扫描探针及其计算机可读介质的方法
- 专利标题： Method for calibrating scanning probe and computer-readable medium therefor
- 专利标题（中）： 用于校准扫描探针及其计算机可读介质的方法
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申请号： US10265027申请日： 2002-10-04
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公开(公告)号： US06701268B2公开(公告)日： 2004-03-02
- 发明人: Takashi Noda , Hiromi Deguchi , Koji Takesako
- 申请人： Takashi Noda , Hiromi Deguchi , Koji Takesako
- 优先权： JP2001-308698 20011004
- 主分类号： G06F1900
- IPC分类号： G06F1900
摘要：
After preparatory measurement of a calibration reference with a scanning probe is performed, apart program for measuring the calibration reference is generated and executed so as to perform calibration measurement. After a calibration value of a coordinate transformation function and reference coordinates of the calibration reference are obtained, a new part program for measuring the calibration reference again is generated by use of the calibration value and the reference transformation coordinates and the part program is executed to perform calibration measurement. Accordingly, the calibration value of the coordinate transformation function and the reference coordinates of the calibration reference can be obtained with higher accuracy.
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