发明授权
- 专利标题: System and method for delivering droplets
- 专利标题(中): 用于输送液滴的系统和方法
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申请号: US10139703申请日: 2002-05-03
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公开(公告)号: US06702419B2公开(公告)日: 2004-03-09
- 发明人: Matthias Stoessel , Stephan Roeger , Dirk Buchhauser
- 申请人: Matthias Stoessel , Stephan Roeger , Dirk Buchhauser
- 主分类号: B41J29393
- IPC分类号: B41J29393
摘要:
Systems and methods are described for delivering droplets. One embodiment provides a system comprising nozzles adapted to deliver droplets to target points on the substrate, a first camera, and means for determining an angular rotation of the substrate in a coordinate system. In some embodiments the means for determining the angular rotation includes a second camera. The substrate has a top surface and alignment marks. The nozzles have droplet delivery openings oriented towards the substrate for delivery of the droplets. The first camera is oriented substantially towards the nozzle openings, and the second camera is oriented substantially towards the substrate top surface.
公开/授权文献
- US20030206207A1 System and method for delivering droplets 公开/授权日:2003-11-06
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