发明授权
US06703187B2 Method of forming a self-aligned twin well structure with a single mask
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用单一掩模形成自对准双阱结构的方法
- 专利标题: Method of forming a self-aligned twin well structure with a single mask
- 专利标题(中): 用单一掩模形成自对准双阱结构的方法
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申请号: US10043861申请日: 2002-01-09
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公开(公告)号: US06703187B2公开(公告)日: 2004-03-09
- 发明人: Yi-Ming Sheu , Fu-Liang Yang
- 申请人: Yi-Ming Sheu , Fu-Liang Yang
- 主分类号: G03F726
- IPC分类号: G03F726
摘要:
An improved method for forming a self-aligned twin well structure for use in a CMOS semiconductor device including providing a substrate for forming a twin well structure therein; forming an implant masking layer over the substrate to include a process surface said masking layer patterned to expose a first portion of the process surface for implanting ions; subjecting the first portion of the process surface to a first ion implantation process to form a first doped region included in the substrate; forming an implant blocking layer including a material that is selectively etchable to the implant masking layer over the first portion of the process surface; removing the implant masking layer to expose a second portion of the process surface; and, subjecting the second portion of the process surface to a second ion implantation process to form a second doped region disposed adjacent to the first doped region.
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