发明授权
US06703658B2 Non-volatile semiconductor memory device and its manufacturing method
有权
非易失性半导体存储器件及其制造方法
- 专利标题: Non-volatile semiconductor memory device and its manufacturing method
- 专利标题(中): 非易失性半导体存储器件及其制造方法
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申请号: US10429460申请日: 2003-05-05
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公开(公告)号: US06703658B2公开(公告)日: 2004-03-09
- 发明人: Toshitake Yaegashi , Kazuhiro Shimizu , Seiichi Aritome
- 申请人: Toshitake Yaegashi , Kazuhiro Shimizu , Seiichi Aritome
- 优先权: JP9-184862 19970710
- 主分类号: H01L27108
- IPC分类号: H01L27108
摘要:
In a non-volatile semiconductor memory device and a method for manufacturing the device, each memory cell and its select Tr have the same gate insulating film as a Vcc Tr. Further, the gate electrodes of a Vpp Tr and Vcc Tr are realized by the use of a first polysilicon layer. A material such as salicide or a metal, which differs from second polysilicon (which forms a control gate layer), may be provided on the first polysilicon layer. With the above features, a non-volatile semiconductor memory device can be manufactured by reduced steps and be operated at high speed in a reliable manner.
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