发明授权
- 专利标题: Method for fabricating capacitor in semiconductor device
- 专利标题(中): 在半导体器件中制造电容器的方法
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申请号: US10316874申请日: 2002-12-12
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公开(公告)号: US06706607B2公开(公告)日: 2004-03-16
- 发明人: Jong-Bum Park , Hoon-Jung Oh , Kyong-Min Kim
- 申请人: Jong-Bum Park , Hoon-Jung Oh , Kyong-Min Kim
- 优先权: KR2002-35096 20020621
- 主分类号: H01L218242
- IPC分类号: H01L218242
摘要:
The present invention relates to a method for fabricating a capacitor in a semiconductor device; and, more particularly, to a method for fabricating a capacitor capable of stably forming a nitride layer on a lower electrode and obtaining improvements on stable capacitance and leakage current characteristics. The inventive method for fabricating a capacitor includes the steps of: forming a lower electrode on a substrate; forming a nitride-based first dielectric thin layer on the lower electrode; forming a second dielectric thin layer by depositing an Al2O3 layer on the nitride-based first dielectric thin layer; forming a third dielectric thin layer on the second dielectric thin layer; and forming an upper electrode on the third dielectric thin layer.
公开/授权文献
- US20030235947A1 METHOD FOR FABRICATING CAPACITOR IN SEMICONDUCTOR DEVICE 公开/授权日:2003-12-25