发明授权
US06709563B2 Copper-plating liquid, plating method and plating apparatus 失效
镀铜液,电镀法和电镀装置

Copper-plating liquid, plating method and plating apparatus
摘要:
There is provided a copper-plating liquid free from an alkali metal and a cyanide which, when used in plating of a substrate having an outer seed layer and fine recesses of a high aspect ratio, can reinforce the thin portion of the seed layer and can embed copper completely into the depth of the fine recesses. The plating liquid contains divalent copper ions and a completing agent, and an optional pH adjusting agent.
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