发明授权
- 专利标题: Copper-plating liquid, plating method and plating apparatus
- 专利标题(中): 镀铜液,电镀法和电镀装置
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申请号: US09893624申请日: 2001-06-29
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公开(公告)号: US06709563B2公开(公告)日: 2004-03-23
- 发明人: Mizuki Nagai , Shuichi Okuyama , Ryoichi Kimizuka , Takeshi Kobayashi
- 申请人: Mizuki Nagai , Shuichi Okuyama , Ryoichi Kimizuka , Takeshi Kobayashi
- 优先权: JP2000-199924 20000630
- 主分类号: C25D502
- IPC分类号: C25D502
摘要:
There is provided a copper-plating liquid free from an alkali metal and a cyanide which, when used in plating of a substrate having an outer seed layer and fine recesses of a high aspect ratio, can reinforce the thin portion of the seed layer and can embed copper completely into the depth of the fine recesses. The plating liquid contains divalent copper ions and a completing agent, and an optional pH adjusting agent.
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