发明授权
US06716289B1 Rigid gas collector for providing an even flow of gasses 失效
刚性气体收集器,用于提供均匀的气体流量

  • 专利标题: Rigid gas collector for providing an even flow of gasses
  • 专利标题(中): 刚性气体收集器,用于提供均匀的气体流量
  • 申请号: US09993613
    申请日: 2001-11-27
  • 公开(公告)号: US06716289B1
    公开(公告)日: 2004-04-06
  • 发明人: Roger SillmonKhang V. Nguyen
  • 申请人: Roger SillmonKhang V. Nguyen
  • 主分类号: C23C1600
  • IPC分类号: C23C1600
Rigid gas collector for providing an even flow of gasses
摘要:
A gas collector for collecting gasses from within a reaction chamber of a reactor comprises a body having a conduit, at least one inlet, an outlet, and a seal disposed on the body. The seal cooperates with a lid of the reactor to prevent escape of reaction gasses from the reaction chamber. The body includes first and second members and is formed from graphite. The seal is formed from molybdenum and is ring-shaped with a generally crescent-shaped cross-section and inner and outer edges. A top surface of the body includes a pair of concentric slots into which the inner and outer edges are respectively positioned. The first and second members can be detachably connected to one another, and the first and second members can be stationary relative to one another during operation of the gas collector.
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