公开(公告)号：US06676758B2

公开(公告)日：2004-01-13

申请号：US09884944

申请日：2001-06-21

申请人： Roger Sillmon ,  Khang V. Nguyen

发明人： Roger Sillmon ,  Khang V. Nguyen

IPC分类号： C23C1600

CPC分类号： C30B25/14 ,  C23C16/4412

摘要： A gas collector for collecting gasses from within a reaction chamber of a reactor comprises a rigid body having a conduit, inlets, an outlet, and a seal disposed on the body. The seal cooperates with a lid of the reactor to prevent escape of reaction gasses from the reaction chamber. The inlets direct the gasses from the reaction chamber into the conduit, and the outlet exhausts the gasses from the conduit. The body includes a first member and a second member with the seal disposed on the second member. The body can include inter-member seals for reducing the flow of the gasses across an interface between the first member and the second member. The inter-member seals disposed between the first member and the second member and allow movement of the first member relative to the second member. The body can also be formed from graphite and can also shape the flow of gasses into the reaction chamber to prevent the formation of standing eddy currents adjacent the gas collector. A method of manufacturing a semiconductor device with the gas collector is also disclosed.

摘要翻译： 用于从反应器的反应室内收集气体的气体收集器包括具有设置在主体上的导管，入口，出口和密封件的刚性体。 密封件与反应器的盖子配合以防止反应气体从反应室逸出。 入口将气体从反应室引导到导管中，并且出口从导管排出气体。 主体包括第一构件和第二构件，其中密封件设置在第二构件上。 主体可以包括用于减少气体在第一构件和第二构件之间的界面上的流动的构件间密封件。 所述构件间密封件设置在所述第一构件和所述第二构件之间并允许所述第一构件相对于所述第二构件的移动。 主体还可以由石墨形成，并且还可以将气体流动形成到反应室中，以防止邻近气体收集器形成静止的涡流。 还公开了一种利用气体收集器制造半导体器件的方法。

公开(公告)号：US06716289B1

公开(公告)日：2004-04-06

申请号：US09993613

申请日：2001-11-27

申请人： Roger Sillmon ,  Khang V. Nguyen

发明人： Roger Sillmon ,  Khang V. Nguyen

IPC分类号： C23C1600

CPC分类号： C23C16/4412 ,  C30B25/14

摘要： A gas collector for collecting gasses from within a reaction chamber of a reactor comprises a body having a conduit, at least one inlet, an outlet, and a seal disposed on the body. The seal cooperates with a lid of the reactor to prevent escape of reaction gasses from the reaction chamber. The body includes first and second members and is formed from graphite. The seal is formed from molybdenum and is ring-shaped with a generally crescent-shaped cross-section and inner and outer edges. A top surface of the body includes a pair of concentric slots into which the inner and outer edges are respectively positioned. The first and second members can be detachably connected to one another, and the first and second members can be stationary relative to one another during operation of the gas collector.

摘要翻译： 用于从反应器的反应室内收集气体的气体收集器包括具有导管，设置在主体上的至少一个入口，出口和密封件的主体。 密封件与反应器的盖子配合以防止反应气体从反应室逸出。 主体包括第一和第二构件并且由石墨形成。 密封由钼形成并且是环形的，具有大致月牙形的横截面和内外边缘。 主体的顶表面包括一对同心槽，内边缘和外边缘分别放置在其中。 第一和第二构件可以可拆卸地彼此连接，并且第一和第二构件在气体收集器的操作期间可以相对于彼此固定。

公开(公告)号：US06666920B1

公开(公告)日：2003-12-23

申请号：US09993614

申请日：2001-11-27

申请人： Roger Sillmon ,  Khang V. Nguyen

发明人： Roger Sillmon ,  Khang V. Nguyen

IPC分类号： C23C1600

CPC分类号： C23C16/4412 ,  C30B25/14

摘要： A gas collector for collecting gasses from within a reaction chamber of a reactor comprises a body having a conduit, at least one inlet, an outlet, and a seal disposed on the body. The seal cooperates with a lid of the reactor to prevent escape of reaction gasses from the reaction chamber. The inlets direct the gasses from the reaction chamber into the conduit, and the outlet exhausts the gasses from the conduit. The gas collector includes means for providing an even flow of gasses through the reaction chamber. The body includes a first member and a second member with the seal disposed on the second member. The body can include inter-member seals for reducing the flow of the gasses across an interface between the first member and the second member. The inter-member seals disposed between the first member and the second member and allow movement of the first member relative to the second member. The body can also be formed from graphite.

摘要翻译： 用于从反应器的反应室内收集气体的气体收集器包括具有导管，设置在主体上的至少一个入口，出口和密封件的主体。 密封件与反应器的盖子配合以防止反应气体从反应室逸出。 入口将气体从反应室引导到导管中，并且出口从导管排出气体。 气体收集器包括用于通过反应室提供平均气体流量的装置。 主体包括第一构件和第二构件，其中密封件设置在第二构件上。 主体可以包括用于减少气体在第一构件和第二构件之间的界面上的流动的构件间密封件。 所述构件间密封件设置在所述第一构件和所述第二构件之间并允许所述第一构件相对于所述第二构件的移动。 身体也可以由石墨形成。