Invention Grant
- Patent Title: Method for forming MRAM bit having a bottom sense layer utilizing electroless plating
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Application No.: US10146890Application Date: 2002-05-17
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Publication No.: US06716644B2Publication Date: 2004-04-06
- Inventor: Hasan Nejad , James G. Deak
- Applicant: Hasan Nejad , James G. Deak
- Main IPC: H10L2100
- IPC: H10L2100

Abstract:
The present invention provides a method of forming an MRAM cell which minimizes the occurrence of electrical shorts during fabrication. A first conductor in a trench is provided in an insulating layer and an upper surface of the insulating layer and the first conductor is planarized. Then, a dielectric layer is deposited to a thickness slightly greater than the desired final thickness of a sense layer, which is formed later. The dielectric layer is then patterned and etched to form an opening for the cell shapes over the first conductor. Then, a permalloy is electroplated in the cell shapes to form the sense layer. The sense layer and dielectric layer are flattened and then a nonmagnetic tunnel barrier layer is deposited. Finally, the pinned layer is formed over the tunnel barrier layer.
Public/Granted literature
- US20030216032A1 Method for forming MRAM bit having a bottom sense layer utilizing electroless plating Public/Granted day:2003-11-20
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