Invention Grant
US06716656B2 Self-aligned hybrid deposition 有权
自对准杂交沉积

Self-aligned hybrid deposition
Abstract:
A method of fabricating an organic device is provided. A first layer is deposited over a substrate through a mask by a first process that results in the first layer having a first area of coverage. A second layer is then deposited over the substrate through the mask by a second process that results in the second layer having a second area of coverage that is different from the first area of coverage.
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