Invention Grant
- Patent Title: Self-aligned hybrid deposition
- Patent Title (中): 自对准杂交沉积
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Application No.: US10233482Application Date: 2002-09-04
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Publication No.: US06716656B2Publication Date: 2004-04-06
- Inventor: Max Shtein , Stephen R. Forrest
- Applicant: Max Shtein , Stephen R. Forrest
- Main IPC: H01L2100
- IPC: H01L2100

Abstract:
A method of fabricating an organic device is provided. A first layer is deposited over a substrate through a mask by a first process that results in the first layer having a first area of coverage. A second layer is then deposited over the substrate through the mask by a second process that results in the second layer having a second area of coverage that is different from the first area of coverage.
Public/Granted literature
- US20030087471A1 Self-aligned hybrid deposition Public/Granted day:2003-05-08
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