发明授权
- 专利标题: Ferroelectric memory device and method of fabricating the same
- 专利标题(中): 铁电存储器件及其制造方法
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申请号: US10245004申请日: 2002-09-16
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公开(公告)号: US06717197B2公开(公告)日: 2004-04-06
- 发明人: Hyeong-Geun An
- 申请人: Hyeong-Geun An
- 优先权: KR2001-58560 20010921
- 主分类号: H01L2976
- IPC分类号: H01L2976
摘要:
A ferroelectric memory device and a method of fabricating the same are provided. The ferroelectric memory device includes at least two capacitor patterns and a plate line. Each of the capacitor patterns includes a lower electrode, a ferroelectric layer, and an upper electrode that are stacked on a semiconductor substrate. A top of the plate line is covered with an oxygen barrier layer, and a sidewall of the plate line is covered with an oxygen barrier spacer.
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