发明授权
- 专利标题: Method for producing article coated with patterned film and photosensitive composition
- 专利标题(中): 用图案化薄膜和感光组合物涂覆制品的方法
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申请号: US09936323申请日: 2001-09-12
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公开(公告)号: US06723487B2公开(公告)日: 2004-04-20
- 发明人: Tsutomu Minami , Masahiro Tatsumisago , Kiyoharu Tadanaga , Atsunori Matsuda , Mitsuhiro Kawadu , Koichiro Nakamura , Hiroaki Yamamoto
- 申请人: Tsutomu Minami , Masahiro Tatsumisago , Kiyoharu Tadanaga , Atsunori Matsuda , Mitsuhiro Kawadu , Koichiro Nakamura , Hiroaki Yamamoto
- 优先权: JP2000-002881 20000111
- 主分类号: G03F7075
- IPC分类号: G03F7075
摘要:
There can be provided a method for producing a pattern film-coated article which has excellent film formability, can remove unexposed portions of a film completely in the development step after exposing the film to light. and has excellent pattern accuracy; and a photosensitive composition. The method for producing a pattern film-coated article comprises the steps of coating a photosensitive composition comprising an organometallic or organosilicon compound having photosensitivity and a hydrolyzable metal or silicon alkoxide on a substrate, irradiating the coated film on the substrate with light to polymerize the exposed portions of the coated film and then dissolving unexposed portions to remove them, wherein a pattern film-coated article is produced from an allyl group-containing metal or silicon alkoxide as the organometallic or organosilicon compound.
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