Method for producing article coated with patterned film and photosensitive composition
    1.
    发明授权
    Method for producing article coated with patterned film and photosensitive composition 失效
    用图案化薄膜和感光组合物涂覆制品的方法

    公开(公告)号:US06723487B2

    公开(公告)日:2004-04-20

    申请号:US09936323

    申请日:2001-09-12

    IPC分类号: G03F7075

    摘要: There can be provided a method for producing a pattern film-coated article which has excellent film formability, can remove unexposed portions of a film completely in the development step after exposing the film to light. and has excellent pattern accuracy; and a photosensitive composition. The method for producing a pattern film-coated article comprises the steps of coating a photosensitive composition comprising an organometallic or organosilicon compound having photosensitivity and a hydrolyzable metal or silicon alkoxide on a substrate, irradiating the coated film on the substrate with light to polymerize the exposed portions of the coated film and then dissolving unexposed portions to remove them, wherein a pattern film-coated article is produced from an allyl group-containing metal or silicon alkoxide as the organometallic or organosilicon compound.

    摘要翻译: 可以提供一种制备具有优异成膜性的图案薄膜包衣制品的方法,可以在将薄膜曝光后在显影步骤中完全去除薄膜的未曝光部分。 具有优异的图案精度; 和感光性组合物。制备图案薄膜包衣制品的方法包括以下步骤:在基材上涂布包含具有光敏性的有机金属或有机硅化合物的光敏组合物和可水解的金属或硅醇盐,在基材上照射基材上的涂膜, 光使聚合涂膜的曝光部分,然后溶解未曝光部分以除去它们,其中由含烯丙基的金属或硅烷醇作为有机金属或有机硅化合物制备图案薄膜包衣制品。