发明授权
US06725121B1 Method and apparatus for using a dynamic control model to compensate for a process interrupt
有权
用于使用动态控制模型来补偿过程中断的方法和装置
- 专利标题： Method and apparatus for using a dynamic control model to compensate for a process interrupt
- 专利标题（中）： 用于使用动态控制模型来补偿过程中断的方法和装置
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申请号： US09864692申请日： 2001-05-24
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公开(公告)号： US06725121B1公开(公告)日： 2004-04-20
- 发明人: Alexander J. Pasadyn , Anthony J. Toprac
- 申请人： Alexander J. Pasadyn , Anthony J. Toprac
- 主分类号： G06F1900
- IPC分类号： G06F1900
摘要：
A method for processing an interrupted workpiece includes providing a dynamic control model defining the processing characteristics of a processing tool throughout a processing run; providing a partially processed workpiece; determining an extent of processing metric for the partially processed workpiece; and determining at least one operating recipe parameter of the processing tool based on the dynamic control model and the extent of processing metric. A manufacturing system includes a processing tool and a process controller. The processing tool is adapted to process a partially processed workpiece in accordance with an operating recipe. The process controller is adapted to determine an extent of processing metric for the partially processed workpiece and determine at least one parameter of the operating recipe based on a dynamic control model defining the processing characteristics of the processing tool throughout a processing run and the extent of processing metric.
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