Invention Grant
US06727121B2 Method for crystallizing a silicon layer and fabricating a TFT using the same 失效
用于使硅层结晶并制造使用该硅层的TFT的方法

  • Patent Title: Method for crystallizing a silicon layer and fabricating a TFT using the same
  • Patent Title (中): 用于使硅层结晶并制造使用该硅层的TFT的方法
  • Application No.: US10053277
    Application Date: 2002-01-18
  • Publication No.: US06727121B2
    Publication Date: 2004-04-27
  • Inventor: Seung Ki JooSeok-Woon Lee
  • Applicant: Seung Ki JooSeok-Woon Lee
  • Priority: KR2001-3463 20010120
  • Main IPC: H01L2100
  • IPC: H01L2100
Method for crystallizing a silicon layer and fabricating a TFT using the same
Abstract:
The present invention relates to a method for crystallizing the active layer of a thin film transistor utilizing crystal filtering technique. According to the conventional metal induced lateral crystallization (MILC) method, amorphous silicon layer can be crystallized into poly-crystal silicon layer. According the crystal filtering technique of the present invention, amorphous silicon layer can be single-crystallized by filtering a single crystal component from the poly-crystal region being crystallized by MILC. The TFT fabricated including an active layer crystallized according to the present method has significantly improved electrical characteristics such as electron mobility and leakage current as compared to the TFT including a poly-crystal silicon active layer made by conventional methods. The invention also provides various TFT fabrication methods applying the crystal filtering technique.
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