Invention Grant
US06729927B2 Method and apparatus for making a shadow mask array 有权
用于制作荫罩阵列的方法和装置

Method and apparatus for making a shadow mask array
Abstract:
A method for making a shadow mask array is taught. Producing a plurality of shadow mask sections; inspecting the plurality of shadow mask sections to determine which shadow mask sections are acceptable as meeting predetermined criteria; positioning a predetermined number of the acceptable mask sections into predetermined locations relative to one another to form a mask section array thereby distributing any error in individual mask sections across the mask section array; and attaching the individual mask sections of the mask section array to a support structure. The support structure allows for expansion and/or contraction of the individual mask sections of the mask section array while maintaining relative positioning of the individual shadow mask section in the shadow mask array. The support structure further allows for compliance of the shadow mask array in a direction normal to the plane of the shadow mask array thereby allowing for a substantially planar interface between the shadow mask array and a substrate to be coated.
Public/Granted literature
Information query
Patent Agency Ranking
0/0