发明授权
- 专利标题： Container-shaped physical vapor deposition targets
- 专利标题（中）： 容器形物理气相沉积靶
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申请号： US10223806申请日： 2002-08-19
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公开(公告)号： US06730198B2公开(公告)日： 2004-05-04
- 发明人: Jianxing Li , Michael R. Pinter , Steven Wu
- 申请人： Jianxing Li , Michael R. Pinter , Steven Wu
- 主分类号： C23C1434
- IPC分类号： C23C1434
摘要：
The invention includes container-shaped physical vapor deposition targets having a first conductive material in a container-shape and a second conductive material on an entirety of an exterior surface of the first conductive material. The second conductive material has a different composition than the first conductive material.
公开/授权文献
- US20030015432A1 Container-shaped physical vapor deposition targets 公开/授权日：2003-01-23
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