- 专利标题: Field effect transistor with improved isolation structures
-
申请号: US10001432申请日: 2001-10-25
-
公开(公告)号: US06730569B2公开(公告)日: 2004-05-04
- 发明人: Lily X. Springer , Binghua Hu , Chin-Yu Tsai , Jozef C. Mitros
- 申请人: Lily X. Springer , Binghua Hu , Chin-Yu Tsai , Jozef C. Mitros
- 主分类号: H01L21336
- IPC分类号: H01L21336
摘要:
An electronic device architecture is described comprising a field effect device in an active region 22 of a substrate 10. Channel stop implant regions 28a and 28b are used as isolation structures and are spaced apart from the active region 22 by extension zones 27a and 27b. The spacing is established by using an inner mask layer 20 and an outer mask layer 26 to define the isolation structures.
公开/授权文献
信息查询