Invention Grant
- Patent Title: Shielded multi-conductor interconnect bus for MEMS
- Patent Title (中): 用于MEMS的屏蔽多导体互连总线
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Application No.: US10099724Application Date: 2002-03-15
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Publication No.: US06731513B2Publication Date: 2004-05-04
- Inventor: Murray Steven Rodgers , Stephen Matthew Barnes
- Applicant: Murray Steven Rodgers , Stephen Matthew Barnes
- Main IPC: H05K702
- IPC: H05K702

Abstract:
A shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources or the like and a method of fabricating a shielded multi-conductor interconnect bus are disclosed. In one embodiment, a shielded interconnect bus formed on a substrate (20) includes a plurality of electrically conductive lines (42) arranged in sets of one, two or more conductive lines between electrically conductive shield walls (46, 66). The electrically conductive lines (42) are surrounded by layers of dielectric material (30, 50). An electrically conductive shield (78) overlies the electrically conductive lines (42) and electrically conductive shield walls (46, 66).
Public/Granted literature
- US20030173654A1 Shielded multi-conductor interconnect bus for MEMS Public/Granted day:2003-09-18
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