发明授权
US06732007B1 Method and apparatus for implementing dynamic qualification recipes
有权
用于实施动态鉴定食谱的方法和装置
- 专利标题： Method and apparatus for implementing dynamic qualification recipes
- 专利标题（中）： 用于实施动态鉴定食谱的方法和装置
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申请号： US10164133申请日： 2002-06-05
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公开(公告)号： US06732007B1公开(公告)日： 2004-05-04
- 发明人: Alexander J. Pasadyn , Christopher A. Bode
- 申请人： Alexander J. Pasadyn , Christopher A. Bode
- 主分类号： G06F1900
- IPC分类号： G06F1900
摘要：
A method includes retrieving current state information associated with a process tool. A dynamic qualification recipe is generated based on the current state information. The dynamic qualification recipe is provided to the process tool for subsequent processing of at least one test workpiece. A system includes a process tool and a qualification recipe controller. The qualification recipe controller is configured to retrieve current state information associated with the process tool, generate a dynamic qualification recipe based on the current state information, and provide the dynamic qualification recipe to the process tool for subsequent processing of at least one test workpiece.