发明授权
US06734489B2 Semiconductor element and MIM-type capacitor formed in different layers of a semiconductor device 失效
形成在半导体器件的不同层中的半导体元件和MIM型电容器

  • 专利标题: Semiconductor element and MIM-type capacitor formed in different layers of a semiconductor device
  • 专利标题(中): 形成在半导体器件的不同层中的半导体元件和MIM型电容器
  • 申请号: US10122387
    申请日: 2002-04-16
  • 公开(公告)号: US06734489B2
    公开(公告)日: 2004-05-11
  • 发明人: Noboru MorimotoKinya GotoMasahiro Matsumoto
  • 申请人: Noboru MorimotoKinya GotoMasahiro Matsumoto
  • 优先权: JP2001-162414 20010530; JP2001-269827 20010906
  • 主分类号: H01L2708
  • IPC分类号: H01L2708
Semiconductor element and MIM-type capacitor formed in different layers of a semiconductor device
摘要:
A second-level wire is formed by a dual damascene process in a insulating film. In an upper surface of the first insulating film a metal film is formed and serves as a first electrode of an MIM-type capacitor. A second insulating films has a structure in which a plurality of insulating films are layered on a second interconnection layer, in this order. In a first insulating film of the plurality of insulating films, a second electrode of the MIM-type capacitor is formed. The second electrode has a first metal film formed on a second insulating film of the plurality of the insulating films and a second metal film is formed on the first metal film. A portion of the second insulating film which is sandwiched between the first electrode and the second electrode of the MIM-type capacitor serves as a capacitor dielectric film of the MIM-type capacitor. In the second insulating film, a third-level wire is formed Thus, a semiconductor device and a method of manufacturing the same are provided such that the MIM-type capacitor is formed together with metal wires with no additional complicated step.
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