Invention Grant
- Patent Title: Prober for testing light-emitting devices on a wafer
- Patent Title (中): 用于测试晶片上发光器件的探测器
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Application No.: US10193522Application Date: 2002-07-11
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Publication No.: US06734959B2Publication Date: 2004-05-11
- Inventor: David J. Griffiths , Jonathan D. Scheuch , Sean David Griffin , Ronald A. Murray , Kelly A. Edgar
- Applicant: David J. Griffiths , Jonathan D. Scheuch , Sean David Griffin , Ronald A. Murray , Kelly A. Edgar
- Main IPC: G01J104
- IPC: G01J104

Abstract:
A prober for measuring the light output of digital devices integrally formed on a single wafer. The prober includes a light-integrating sphere sequentially aligned with selected devices. Each time that a device is aligned with the sphere, the device aligned with the sphere is activated, so that the light output of each device is individually measured. In the disclosed embodiment, the devices are vertical cavity surface emitting lasers (VCSELs) and light emitting diodes (LEDs).
Public/Granted literature
- US20030020897A1 Prober for testing light-emitting devices on a wafer Public/Granted day:2003-01-30
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