Invention Grant
- Patent Title: Chirp compensation method and apparatus
- Patent Title (中): 啁啾补偿方法及装置
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Application No.: US10165766Application Date: 2002-06-06
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Publication No.: US06735225B2Publication Date: 2004-05-11
- Inventor: Hans-Stephan Albrecht , Matthias Kramer , Marcus Serwazi , Thomas Schroeder , Stefan Niedermeier
- Applicant: Hans-Stephan Albrecht , Matthias Kramer , Marcus Serwazi , Thomas Schroeder , Stefan Niedermeier
- Main IPC: H01S310
- IPC: H01S310
Abstract:
A wavelength chirp compensation method for an excimer or molecular fluorine laser system operating in burst mode, includes pre-programming into a computer of the laser system resonator tuning optic adjustments for making the adjustments during pauses between bursts to compensate wavelength chirp at beginnings of succeeding bursts.
Public/Granted literature
- US20030016708A1 Chirp compensation method and apparatus Public/Granted day:2003-01-23
Information query
