发明授权
US06740560B1 Bipolar transistor and method for producing same 失效
双极晶体管及其制造方法

Bipolar transistor and method for producing same
摘要:
The aim of the invention is to provide for a bipolar transistor and a method for producing the same. Said bipolar transistor should have minimal base-emitter capacities and very good high frequency characteristics. The static characteristics, especially the base current ideality and the low frequency noise, of a bipolar transistor with weakly doped cap layer (116) should not significantly deteriorate and process complexity should not increase. According to the invention, the problem is solved by inserting a special doping profile in a cap layer (116) (cap doping) which has been produced epitaxially. A minimal base emitter capacity and very good high frequency characteristics can be obtained by means of said doping profile. At the same time, the efficiency of the generation/recombination active boundary surface between the cap layer (116) and the isolator (117) in the polysilicon overlapping area in the relevant working area of the transistor is reduced and the base current ideality is improved. The section at the base side in the cap layer (116) has a preferred thickness of between 20 nm and 70 nm and is only doped weakly, preferably less than 5·1016 cm−3. Said section is crucial for the good high frequency characteristics.
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