发明授权
US06744183B2 Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method 失效
压电元件与电极的接合方法以及使用该接合方法的压电微型致动器

Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method
摘要:
A method of bonding a piezoelectric element and an electrode, including the steps of forming a first coating of a material selected from the group consisting of Au, Al, Zn, Cu, and Sn on a bonding surface of the piezoelectric element, and forming a second coating of a material selected from the group consisting of Au, Al, Zn, Cu, and Sn on a bonding surface of the electrode. The combination of the materials of the first and second coatings is preferably Au/Au, Au/Al, Zn/Cu, or Sn/Cu. The method further includes the step of bringing the first and second coatings into close contact with each other and heating them under pressure to form a metallic bond or intermetallic compound between the first and second coatings, thereby bonding the piezoelectric element and the electrode.
信息查询
0/0