Invention Grant
- Patent Title: Two-dimensional micro-mirror array enhancements
- Patent Title (中): 二维微镜阵列增强
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Application No.: US10157354Application Date: 2002-05-28
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Publication No.: US06744550B2Publication Date: 2004-06-01
- Inventor: Armand P. Neukermans , Timothy G. Slater , Marc R. Schuman , Jack D. Foster , Sam Calmes , Sateesh S. Bajikar , Arun Malhotra , Jane Ang , Jerry Hurst , John Green
- Applicant: Armand P. Neukermans , Timothy G. Slater , Marc R. Schuman , Jack D. Foster , Sam Calmes , Sateesh S. Bajikar , Arun Malhotra , Jane Ang , Jerry Hurst , John Green
- Main IPC: G02B2500
- IPC: G02B2500

Abstract:
A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
Public/Granted literature
- US20030076576A1 Two-dimensional micro-mirror array enhancements Public/Granted day:2003-04-24
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