- 专利标题: Plating method and plating apparatus
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申请号: US09955115申请日: 2001-09-19
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公开(公告)号: US06746589B2公开(公告)日: 2004-06-08
- 发明人: Koji Mishima , Hiroaki Inoue , Natsuki Makino , Junji Kunisawa , Kenji Nakamura , Tetsuo Matsuda , Hisashi Kaneko , Toshiyuki Morita
- 申请人: Koji Mishima , Hiroaki Inoue , Natsuki Makino , Junji Kunisawa , Kenji Nakamura , Tetsuo Matsuda , Hisashi Kaneko , Toshiyuki Morita
- 优先权: JP2000-285740 20000920; JP2000-294665 20000927; JP2001-248125 20010817
- 主分类号: C25D500
- IPC分类号: C25D500
摘要:
The present invention relates to a plating method and a plating apparatus which can attain embedding of copper into fine interconnection patterns with use of a plating liquid having high throwing power and leveling properties, and which can make film thickness of a plated film substantially equal between an interconnection region and a non-interconnection region. A plating method comprises filling a plating liquid containing metal ions and an additive into a plating space formed between a substrate and an anode disposed closely to the substrate so as to face the substrate, and changing concentration of the additive in the plating liquid filled into the plating space during a plating process.
公开/授权文献
- US20020056647A1 Plating method and plating apparatus 公开/授权日:2002-05-16
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