发明授权
US06747529B2 Piezoelectric thin film resonator and frequency variable resonator using the resonator
失效
使用谐振器的压电薄膜谐振器和频率可变谐振器
- 专利标题： Piezoelectric thin film resonator and frequency variable resonator using the resonator
- 专利标题（中）： 使用谐振器的压电薄膜谐振器和频率可变谐振器
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申请号： US10235785申请日： 2002-09-06
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公开(公告)号： US06747529B2公开(公告)日： 2004-06-08
- 发明人: Kazuhide Abe , Naoko Yanase , Takaaki Yasumoto , Ryoichi Ohara , Tatsuo Shimizu , Takashi Kawakubo
- 申请人： Kazuhide Abe , Naoko Yanase , Takaaki Yasumoto , Ryoichi Ohara , Tatsuo Shimizu , Takashi Kawakubo
- 优先权： JP2001-288763 20010921
- 主分类号： H03H915
- IPC分类号： H03H915
摘要：
A piezoelectric thin film resonator which comprises a first electrode, a second electrode, and a piezoelectric film which is interposed between the first electrode and the second electrode, and formed of an epitaxial ferroelectric thin film containing barium titanate, a spontaneous polarization of the epitaxial ferroelectric thin film being uniaxially orientated in a direction normal to a film surface.