发明授权
- 专利标题： Method of fabricating electron-emitting device, electron source and image-forming apparatus using the electron source
- 专利标题（中）： 使用电子源制造电子发射器件，电子源和图像形成装置的方法
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申请号： US10152828申请日： 2002-05-23
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公开(公告)号： US06755709B2公开(公告)日： 2004-06-29
- 发明人: Kazuhiro Jindai , Mineto Yagyu
- 申请人： Kazuhiro Jindai , Mineto Yagyu
- 优先权： JP2001/156732 20010525; JP2002/140959 20020516
- 主分类号： H01J902
- IPC分类号： H01J902
摘要：
In a method of fabricating an electron-emitting device, an activation step is performed in shorter time. The method forms a deposit of carbon or carbon compound on a precursory structure which becomes an electron-emitting region in an electron-emitting device made on a substrate and comprises a first step for depositing carbon or carbon compound in a gas atmosphere which includes a carbon compound of a first molecular weight, and subsequently a second step for depositing carbon or carbon compound in a gas atmosphere which includes a carbon compound of a second molecular weight smaller than the first molecular weight.
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