发明授权
- 专利标题: Ion beam deposition targets having an interlocking interface and a replaceable insert
- 专利标题(中): 离子束沉积靶具有互锁界面和可更换插入物
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申请号: US10004212申请日: 2001-11-02
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公开(公告)号: US06755944B2公开(公告)日: 2004-06-29
- 发明人: Henry L. Grohman , Robert Acker , Matthew T. Wilson
- 申请人: Henry L. Grohman , Robert Acker , Matthew T. Wilson
- 主分类号: C23C1434
- IPC分类号: C23C1434
摘要:
An ion beam deposition target source consisting of a removable, centrally located inner insert surrounded by an outer region. The insert can be removed and replaced when eroded, while the outer region of the target source not eroded by the ion beam remains in place attached to a backing plate. The inner insert and the outer region are joined to each other by an interface comprising an interlocking lip or grove structure located on opposing mating surfaces on the inner insert and outer region, thereby forming the deposition target source when these components are united. The deposition target source can be attached by a bonding layer to a backing plate which is installed into an ion beam deposition machine.
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