发明授权
US06759251B2 Semiconductor device having ferroelectic memory cells and method of manufacturing the same 失效
具有铁电存储单元的半导体器件及其制造方法

  • 专利标题: Semiconductor device having ferroelectic memory cells and method of manufacturing the same
  • 专利标题(中): 具有铁电存储单元的半导体器件及其制造方法
  • 申请号: US10320524
    申请日: 2002-12-17
  • 公开(公告)号: US06759251B2
    公开(公告)日: 2004-07-06
  • 发明人: Tohru Ozaki
  • 申请人: Tohru Ozaki
  • 优先权: JP2000-87388 20000327
  • 主分类号: H01L2100
  • IPC分类号: H01L2100
Semiconductor device having ferroelectic memory cells and method of manufacturing the same
摘要:
A semiconductor device having ferroelectric memory cells has memory cell transistors each including first and second source/drain regions. Plug electrodes are formed in contact with the first and second source/drain regions, respectively. A ferroelectric capacitor is formed on the plug electrode connected to the first source/drain region. The ferroelectric capacitor includes a first lower electrode formed on the plug electrode, a ferroelectric film formed on the first lower electrode, and an upper electrode formed on the ferroelectric film. A second lower electrode is formed on the plug electrode connected to the second source/drain region. Wiring is formed to connect the upper electrode to the corresponding second lower electrode.
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