发明授权
摘要:
In DRAM memory cells, individual memory cells are isolated from one another by an isolation trench (STI). In such a case, a vertical transistor is formed by the isolation trench as SOI transistor because its channel region is isolated from a substrate by the isolation trench. A vertical transistor that is used, for example, in a DRAM memory cell and a method for making the transistor includes connecting the channel region of the vertical transistor to the substrate by disposing a conductive layer in the isolation trench between a lower insulation filling and an upper insulation filling.
公开/授权文献
- US20030080346A1 Vertical transistor and transistor fabrication method 公开/授权日:2003-05-01
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