发明授权
- 专利标题: FinFET device with multiple fin structures
- 专利标题(中): FinFET器件具有多个鳍结构
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申请号: US10405343申请日: 2003-04-03
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公开(公告)号: US06762448B1公开(公告)日: 2004-07-13
- 发明人: Ming-Ren Lin , Haihong Wang , Bin Yu
- 申请人: Ming-Ren Lin , Haihong Wang , Bin Yu
- 主分类号: H01L2708
- IPC分类号: H01L2708
摘要:
A semiconductor device includes a group of fin structures. The group of fin structures includes a conductive material and is formed by growing the conductive material in an opening of an oxide layer. The semiconductor device further includes a source region formed at one end of the group of fin structures, a drain region formed at an opposite end of the group of fin structures, and at least one gate.
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