发明授权
- 专利标题： Electromagnetic actuator and exposure apparatus having the same
- 专利标题（中）： 具有该电磁致动器和曝光设备
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申请号： US10105327申请日： 2002-03-26
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公开(公告)号： US06762516B2公开(公告)日： 2004-07-13
- 发明人: Hiroyuki Maruyama
- 申请人： Hiroyuki Maruyama
- 优先权： JP2001-095059 20010329
- 主分类号： H02K4100
- IPC分类号： H02K4100
摘要：
An electromagnetic actuator having stationary and movable elements. The actuator includes a magnet arranged on one of the stationary and movable elements, a coil arranged on the other one of the stationary and movable elements, a first coolant channel formed near the coil, and a second coolant channel formed in or near a surface of at least one of the stationary and movable elements. The first coolant channel and the second coolant channel are formed between the coil and the surface or in the surface.
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